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Semiconductor Equipment
SEMI

 
SEMI Services - Overview
Requirements for compliance to SEMI S2 including S8 and S14 are becoming common stipulations in purchase orders and engineering specifications. SEMI Standards Compliance is best demonstrated through a detailed SEMI S2 Evaluation report created by an independent third party testing laboratory. CertifiGroup's Engineers are certified per SEMI S7 Evaluation requirements.

S2 Assessments
The SEMI S2 assessment starts with identifying the appropriate Standards that will apply to your equipment.
The SEMI Standards are:

SEMI S1 - Symbols & Warnings
SEMI S2 - Safety Guidelines for all manufacturing equipment
SEMI S3 - Heated Chemical Baths
SEMI S4 - Separation of Chemical Cylinders in Dispensing Cabinets
SEMI S5 - Sizing and Identifying Flow Limiting Devices
SEMI S6 - Ventilation
SEMI S7 - Environmental Safety & Heath Evaluations
SEMI S8 - Ergonomics
SEMI S9 - Test Methods
SEMI S10 - Risk Assessment and Risk Evaluation
SEMI S11 - Environmental Safety and Health Guidelines for Minienvironments
SEMI S13 - Guidelines for Operation and Maintenance Manuals
SEMI S14 - Safety Guidelines for Fire Risk Assessment and Mitigation

Environmental Safety & Health
CertifiGroup SEMI Evaluation Services include a wide range of health and safety provisions, including regulatory requirements, electrical, mechanical, fire, chemical, radiation, noise, and ergonomics hazards, emergency shutdown, ventilation, and exhaust specifications.
CertifGroup Engineers are experienced in electrical/mechanical safety, chemical exposure assessments and other areas of expertise related to the requirements of the SEMI S2 Evaluation Guidelines.

Product Design & Electrical Safety
SEMI S2 Guideline states that products need to conform to the most recent electrical codes for the country of use. In the North American market, this usually means the National Electric Code (NFPA 70), and possibly other US Standards. CertifiGroup can also provide a third party NRTL SEMI S2 report. For Europe, compliance with IEC and EN Standards will be needed.

Risk Analysis
Risk assessments can be performed and documented in accordance with SEMI S10, EN 1050, EN 292, based on the process of identifying hazards and implementing controls, aka "hazard mitigating features," to bring the risk associated with hazards to acceptable levels.

Industrial Hygiene
Safety and health issues can affect workers and have secondary effects, such as downtime and reduction of productivity. CertifiGroup investigates industrial hygiene and hazardous material issues related to equipment and personnel exposure to help reduce the likelihood of equipment damage or injury to personnel. Evaluations range from tracer gas testing, to noise and hazardous physical agents, such as non-ionizing and ionizing radiation, microwave energy, electrical and magnetic fields.

SEMI Ergonomics
Utilizing ergonomics/human factors can increase company profits by lowering or eliminating redesign costs and reducing insurance and product liability costs. Compliance with these SEMI guidelines promotes compatibility of user personnel and equipment within a semiconductor manufacturing environment, and helps to reduce the likelihood and possible causes of workplace injuries such as repetitive motion, heavy loads, or over extension.

Resources

 
SEMI Emerging Technology News



 



 

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